Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6113702 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2000-09-05 |
| 6093252 | Process chamber with inner support | John F. Wengert, Loren Jacobs, Michael Halpin, Derrick W. Foster, Cornelius A. van der Jeugd +1 more | 2000-07-25 |
| 6053982 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more | 2000-04-25 |
| 6032093 | Apparatus and method for restricting implement movement of a work machine | Lee R. Denbraber, Ronald J. Penick, Steve J. Zmuda | 2000-02-29 |
| 5997588 | Semiconductor processing system with gas curtain | Dennis L. Goodwin, Richard Crabb, Allan Doley | 1999-12-07 |
| 5925081 | System and method for managing access to a load resource having a loading machine | Carl A. Kemner, Craig L. Koehrsen, Joel L. Peterson | 1999-07-20 |
| 5897595 | System and method for managing access of a fleet of mobile machines to a resource having multiple entry points | Carl A. Kemner, Craig L. Koehrsen | 1999-04-27 |
| 5823295 | Lubrication control system for a work machine | Bobby D. Griffith, Dean J. Schlickbernd, Steven J. Zmuda | 1998-10-20 |
| 5819684 | Gas injection system for reaction chambers in CVD systems | McDonald Robinson | 1998-10-13 |
| 5564274 | Cold oil protection circuit for a hydraulic system | Lee R. Denbraber, David R. Meinhold, Steven J. Zmuda | 1996-10-15 |
| 5525157 | Gas injectors for reaction chambers in CVD systems | McDonald Robinson | 1996-06-11 |
| 5511457 | Steering control system for an autonomous machine | Joel L. Peterson, Kenneth E. Poppe | 1996-04-30 |
| 5469356 | System for controlling a vehicle to selectively allow operation in either an autonomous mode or a manual mode | Joel L. Peterson | 1995-11-21 |
| 5467240 | Driver circuit with diagnostics and over voltage protection | Gregory L. Williamson, William J. Tate | 1995-11-14 |
| 5458918 | Gas injectors for reaction chambers in CVD systems | McDonald Robinson | 1995-10-17 |
| 5450082 | Single multi-purpose input for different types of sensors with data edge conditioning circuit or ADC to provide digital output | Jeffrey Lynn Finley, Gregory L. Williamson | 1995-09-12 |
| 5435682 | Chemical vapor desposition system | Richard Crabb, McDonald Robinson, Dennis L. Goodwin, Armand P. Ferro, Wiebe B. deBoer +1 more | 1995-07-25 |
| 5411590 | Gas injectors for reaction chambers in CVD systems | McDonald Robinson | 1995-05-02 |
| 5221556 | Gas injectors for reaction chambers in CVD systems | McDonald Robinson | 1993-06-22 |
| 5156521 | Method for loading a substrate into a GVD apparatus | Richard Crabb, McDonald Robinson, Dennis L. Goodwin, Armand P. Ferro | 1992-10-20 |
| 5092728 | Substrate loading apparatus for a CVD process | Richard Crabb, McDonald Robinson, Dennis L. Goodwin, Armand P. Ferro, Wiebe B. deBoer +1 more | 1992-03-03 |
| 5020475 | Substrate handling and transporting apparatus | Richard Crabb, McDonald Robinson, Dennis L. Goodwin, Armand P. Ferro | 1991-06-04 |
| 4874464 | Process for epitaxial deposition of silicon | Dennis L. Goodwin, Wayne Johnson, Aage Olsen, McDonald Robinson | 1989-10-17 |
| 4828224 | Chemical vapor deposition system | Richard Crabb, McDonald Robinson, Dennis L. Goodwin, Armand P. Ferro, Albert E. Ozias +1 more | 1989-05-09 |