Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10604847 | Gas distribution system, reactor including the system, and methods of using the same | Mark Hawkins, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys | 2020-03-31 |
| 10167557 | Gas distribution system, reactor including the system, and methods of using the same | Mark Hawkins, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys | 2019-01-01 |
| 5854122 | Epitaxial layer for dissolved wafer micromachining process | Kenneth Maxwell Hays, Eugene Coleman Whitcomb | 1998-12-29 |
| 5103183 | Method of profiling compensator concentration in semiconductors | Robert Klein | 1992-04-07 |