Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277666 | Precisely defined microelectromechanical structures and associated fabrication methods | Kenneth Maxwell Hays | 2001-08-21 |
| 5854122 | Epitaxial layer for dissolved wafer micromachining process | Kenneth Maxwell Hays, Bradley Leonard Halleck | 1998-12-29 |
| 4444617 | Reactive ion etching of molybdenum silicide and N+ polysilicon | — | 1984-04-24 |