Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Nyi O. Myo, Preetham Rao +5 more | 2021-11-09 |
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Kartik Shah, Nyi O. Myo, Schubert S. Chu, Jeffrey Tobin +1 more | 2019-12-31 |