Issued Patents All Time
Showing 26–50 of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9120075 | UV assisted polymer modification and in situ exhaust cleaning | — | 2015-09-01 |
| 9111980 | Gas exhaust for high volume, low cost system for epitaxial silicon deposition | Michael R. Rice, Kartik Shah, Kashif Maqsood, Pravin K. Narwankar | 2015-08-18 |
| 9032990 | Chemical delivery system | Marcel E. Josephson, Steve Jumper, Errol Antonio C. Sanchez | 2015-05-19 |
| 8991332 | Apparatus to control semiconductor film deposition characteristics | Satheesh Kuppurao, Manish Hemkar, Andrew Lam, Errol Antonio C. Sanchez, Howard Beckford | 2015-03-31 |
| 8986454 | Window assembly for use in substrate processing systems | — | 2015-03-24 |
| 8980005 | Liner assembly for chemical vapor deposition chamber | Mehmet Tugrul Samir, Nyi O. Myo | 2015-03-17 |
| 8960235 | Gas dispersion apparatus | — | 2015-02-24 |
| 8813538 | Methods and apparatus for insitu analysis of gases in electronic device fabrication systems | Satheesh Kuppurao | 2014-08-26 |
| 8726837 | Semiconductor process chamber vision and monitoring system | Kailash Kiran Patalay, Craig Metzner | 2014-05-20 |
| 8724976 | Use of infrared camera for real-time temperature monitoring and control | Nir Merry, Stephen Moffatt, Kailash Kiran Patalay | 2014-05-13 |
| 8663390 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2014-03-04 |
| 8658540 | Methods for low temperature conditioning of process chambers | Yi-Chiau Huang, Errol Antonio C. Sanchez, Zhiyuan Ye | 2014-02-25 |
| 8603898 | Method for forming group III/V conformal layers on silicon substrates | Xinyu BAO, Errol Antonio C. Sanchez, Zhiyuan Ye | 2013-12-10 |
| 8551415 | UV assisted polymer modification and in situ exhaust cleaning | — | 2013-10-08 |
| 8524555 | Susceptor with backside area of constant emissivity | Errol Antonio C. Sanchez, Craig Metzner | 2013-09-03 |
| 8501600 | Methods for depositing germanium-containing layers | Errol Antonio C. Sanchez, Yi-Chiau Huang | 2013-08-06 |
| 8343317 | In situ cleaning of CVD System exhaust | — | 2013-01-01 |
| 8337619 | Polymeric coating of substrate processing system components for contamination control | Roger N. Anderson | 2012-12-25 |
| 8313804 | Apparatus and methods for chemical vapor deposition | Errol Antonio C. Sanchez, Satheesh Kuppurao | 2012-11-20 |
| 8309440 | Method and apparatus for cleaning a substrate surface | Errol Antonio C. Sanchez, Johanes S. Swenberg, Roisin L. Doherty | 2012-11-13 |
| 8226770 | Susceptor with backside area of constant emissivity | Errol Antonio C. Sanchez, Craig Metzner | 2012-07-24 |
| 8150242 | Use of infrared camera for real-time temperature monitoring and control | Nir Merry, Stephen Moffatt, Kailash Kiran Patalay | 2012-04-03 |
| 8020427 | Methods and apparatus for insitu analysis of gases in electronic device fabrication systems | Satheesh Kuppurao | 2011-09-20 |
| 8008166 | Method and apparatus for cleaning a substrate surface | Errol Antonio C. Sanchez, Johanes S. Swenberg, Roisin L. Doherty | 2011-08-30 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2011-07-12 |