Issued Patents All Time
Showing 76–96 of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6064799 | Method and apparatus for controlling the radial temperature gradient of a wafer while ramping the wafer temperature | Roger N. Anderson | 2000-05-16 |
| 6060788 | Vehicle driver module | Thomas Schaffer, Timothy J. Green | 2000-05-09 |
| 5924058 | Permanently mounted reference sample for a substrate measurement tool | Ann Waldhauer, Paul B. Comita | 1999-07-13 |
| 5916369 | Gas inlets for wafer processing chamber | Roger N. Anderson, Peter Hey, Mahalingam Venkatesan, Norma Riley | 1999-06-29 |
| 5914050 | Purged lower liner | Paul B. Comita, Kimberly E. Klinck, Harold J. Mellen, III | 1999-06-22 |
| 5876797 | Low temperature high pressure silicon deposition method | Israel Beinglass | 1999-03-02 |
| 5855677 | Method and apparatus for controlling the temperature of reaction chamber walls | Norma Riley, Roger N. Anderson | 1999-01-05 |
| 5700520 | Low temperature, high pressure silicon deposition method | Israel Beinglass | 1997-12-23 |
| 5607724 | Low temperature high pressure silicon deposition method | Israel Beinglass | 1997-03-04 |
| 5476359 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, Paul R. Lindstrom | 1995-12-19 |
| 5421957 | Low temperature etching in cold-wall CVD systems | H. Peter W. Hey, James Hann | 1995-06-06 |
| 5411593 | Apparatus for servicing vacuum chamber using non-reactive gas filled maintenance enclosure | Norma Riley | 1995-05-02 |
| 5374159 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, Paul R. Lindstrom | 1994-12-20 |
| 5316794 | Method for servicing vacuum chamber using non-reactive gas-filled maintenance enclosure | Norma Riley | 1994-05-31 |
| 5258824 | In-situ measurement of a thin film deposited on a wafer | Russell Bowman | 1993-11-02 |
| 5179677 | Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity | Roger N. Anderson, Thomas E. Deacon | 1993-01-12 |
| 5116181 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, Paul R. Lindstrom | 1992-05-26 |
| 5104276 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, Paul Lindstrom | 1992-04-14 |
| 4928626 | Reactant gas injection for IC processing | Paul R. Lindstrom | 1990-05-29 |
| 4478322 | Lockup clutch control system | William G. Burnia, William J. Haley | 1984-10-23 |
| 4206491 | Entry system | James R. Ligman, Peter N. Kaufman, Harry W. Kompanek | 1980-06-03 |