Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5476359 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, David K. Carlson | 1995-12-19 |
| 5455070 | Variable rate distribution gas flow reaction chamber | Roger N. Anderson, Wayne Johnson | 1995-10-03 |
| 5374159 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, David K. Carlson | 1994-12-20 |
| 5269847 | Variable rate distribution gas flow reaction chamber | Roger N. Anderson, Wayne Johnson | 1993-12-14 |
| 5121531 | Refractory susceptors for epitaxial deposition apparatus | David W. Severns | 1992-06-16 |
| 5116181 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, David K. Carlson | 1992-05-26 |
| 4928626 | Reactant gas injection for IC processing | David K. Carlson | 1990-05-29 |