Issued Patents All Time
Showing 51–75 of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967911 | Apparatus and methods for chemical vapor deposition | Errol Antonio C. Sanchez, Satheesh Kuppurao | 2011-06-28 |
| 7770431 | Methods and apparatus for insitu analysis of gases in electronic device fabrication systems | Satheesh Kuppurao | 2010-08-10 |
| 7758697 | Silicon-containing layer deposition with silicon compounds | Paul B. Comita, Lance A. Scudder | 2010-07-20 |
| 7718225 | Method to control semiconductor film deposition characteristics | Satheesh Kuppurao, Manish Hemkar, Andrew Lam, Errol Antonio C. Sanchez, Howard Beckford | 2010-05-18 |
| 7709391 | Methods for in-situ generation of reactive etch and growth specie in film formation processes | Satheesh Kuppurao, Howard Beckford, Errol Antonio C. Sanchez | 2010-05-04 |
| 7645339 | Silicon-containing layer deposition with silicon compounds | Kaushal K. Singh, Paul B. Comita, Lance A. Scudder | 2010-01-12 |
| 7560352 | Selective deposition | Satheesh Kuppurao, Errol Antonio C. Sanchez, Howard Beckford, Yihwan Kim | 2009-07-14 |
| 7540920 | Silicon-containing layer deposition with silicon compounds | Kaushal K. Singh, Paul B. Comita, Lance A. Scudder | 2009-06-02 |
| 7534714 | Radial temperature control for lattice-mismatched epitaxy | Lori D. Washington, Sandeep Nijhawan | 2009-05-19 |
| 7396743 | Low temperature epitaxial growth of silicon-containing films using UV radiation | Kaushal K. Singh, Manish Hemkar, Satheesh Kuppurao, Randhir P. S. Thakur | 2008-07-08 |
| 7262116 | Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation | Kaushal K. Singh, Manish Hemkar, Satheesh Kuppurao, Randhir P. S. Thakur | 2007-08-28 |
| 6876442 | Method of calibrating and using a semiconductor processing system | Jean R. Vatus, Arkadii V. Samoilov, Lance A. Scudder, Paul B. Comita, Annie Karpati | 2005-04-05 |
| 6685779 | Method and a system for sealing an epitaxial silicon layer on a substrate | Paul B. Comita, Norma Riley, Dale R. Du Bois | 2004-02-03 |
| 6500734 | Gas inlets for wafer processing chamber | Roger N. Anderson, Peter Hey, Mahalingam Venkatesan, Norma Riley | 2002-12-31 |
| 6489220 | Method and a system for sealing an epitaxial silicon layer on a substrate | Dale R. Du Bois | 2002-12-03 |
| 6476362 | Lamp array for thermal processing chamber | Thomas E. Deacon, Roger N. Anderson, Paul B. Comita | 2002-11-05 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Dale R. DuBois, Lance A. Scudder, Paul B. Comita, Lori D. Washington +1 more | 2002-09-24 |
| 6436194 | Method and a system for sealing an epitaxial silicon layer on a substrate | Dale R. Du Bois | 2002-08-20 |
| 6376387 | Method of sealing an epitaxial silicon layer on a substrate | Paul B. Comita, Norma Riley, Dale R. Du Bois | 2002-04-23 |
| 6368567 | Point-of-use exhaust by-product reactor | Paul B. Comita, Rekha Ranganathan, Dale R. DuBois, Hali Forstner | 2002-04-09 |
| 6315833 | Silicon carbide sleeve for substrate support assembly | Lori Ann Callaghan, Roger N. Anderson | 2001-11-13 |
| 6254686 | Vented lower liner for heating exhaust gas from a single substrate reactor | Paul B. Comita, Norma Riley, Doria W. Fan, Rekha Ranganathan | 2001-07-03 |
| 6245149 | Inert barrier for high purity epitaxial deposition systems | Romain Beau de Lomenie | 2001-06-12 |
| 6153260 | Method for heating exhaust gas in a substrate reactor | Paul B. Comita, Norma Riley, Doria W. Fan, Rekha Ranganathan | 2000-11-28 |
| 6083323 | Method for controlling the temperature of the walls of a reaction chamber during processing | Norma Riley, Roger N. Anderson | 2000-07-04 |