Wafer heater with backside and integrated bevel purge

Assignee

• Applied Materials

Inventors

• Tejas Ulavi (24 patents)
• Vijay D. Parkhe (143 patents)
• Naveen Kumar Nagaraja (1 patents)
• Sanjeev Baluja (104 patents)
• Surajit Kumar (14 patents)
• Dhritiman Subha Kashyap (21 patents)
• Ashutosh Agarwal (36 patents)

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