Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12183618 | Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool | Sanjeev Baluja, Tejas Ulavi, Ashutosh Agarwal | 2024-12-31 | $49,330,000 |
| D1037778 | Gas distribution plate | Ashutosh Agarwal, Dhritiman Subha Kashyap, Kartik Shah, Amit Rajendra Sherekar, Sanjeev Baluja | 2024-08-06 | |
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Sanjeev Baluja +1 more | 2023-11-14 | $33,075,000 |
| D980884 | Lift pin | — | 2023-03-14 |