Heater assembly with purge gap control and temperature uniformity for batch processing chambers

Assignee

• Applied Materials

Inventors

• Dhritiman Subha Kashyap (21 patents)
• Amit Rajendra Sherekar (2 patents)
• Kartik Shah (68 patents)
• Ashutosh Agarwal (36 patents)
• Eric J. Hoffmann (4 patents)
• Sanjeev Baluja (104 patents)
• Vijay D. Parkhe (143 patents)

View full patent text on Google Patents →