| 12191118 |
Monolithic modular microwave source with integrated process gas distribution |
James D. Carducci, Richard Fovell, Silverst Rodrigues, Vladimir Knyazik, Philip Allan Kraus +1 more |
2025-01-07 |
| 12144090 |
Monolithic modular microwave source with integrated temperature control |
James D. Carducci, Richard Fovell, Silverst Rodrigues, Thai Cheng Chua, Philip Allan Kraus |
2024-11-12 |
| 11915850 |
Two channel cosine-theta coil assembly |
Richard Fovell, Kartik Ramaswamy |
2024-02-27 |
| 11881384 |
Monolithic modular microwave source with integrated process gas distribution |
James D. Carducci, Richard Fovell, Silverst Rodrigues, Vladimir Knyazik, Philip Allan Kraus +1 more |
2024-01-23 |
| 11670489 |
Modular microwave source with embedded ground surface |
Joseph AuBuchon, James D. Carducci, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua |
2023-06-06 |
| 11564292 |
Monolithic modular microwave source with integrated temperature control |
James D. Carducci, Richard Fovell, Silverst Rodrigues, Thai Cheng Chua, Philip Allan Kraus |
2023-01-24 |
| 11049694 |
Modular microwave source with embedded ground surface |
Joseph AuBuchon, James D. Carducci, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua |
2021-06-29 |
| 9653267 |
Temperature controlled chamber liner |
James D. Carducci, Kallol Bera, Nipun Misra |
2017-05-16 |
| 8608852 |
Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies |
Chetan Mahadeswaraswamy, Kallol Bera |
2013-12-17 |
| 6983892 |
Gas distribution showerhead for semiconductor processing |
Hamid Noorbakhsh, James D. Carducci, Jennifer Y. Sun |
2006-01-10 |
