Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fabricating plug and near-zero overlap interconnect line

Fabricating plug and near-zero overlap interconnect line

US Patent 6455921 · Granted Sep 24, 2002

Estimated economic value: $13,765,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Monolithic complementary field-effect transistors having carbon-doped release la2025
Copper, indium, gallium, selenium (CIGS) films with improved quantum efficiency2025
Copper, indium, gallium, selenium (CIGS) films with improved quantum efficiency2023
Method and apparatus for thin wafer carrier2021
Methods and apparatus for producing copper-indium-gallium-selenium (CIGS) film2021
Method of creating CIGS photodiode for image sensor applications2021
Sealing structure for workpiece to substrate bonding in a processing chamber2021
Electrostatic chucking force measurement tool for process chamber carriers2020
Automated apparatus to temporarily attach substrates to carriers without adhesiv2020
Method and system for wafer level singulation2016
Method of diced wafer transportation2015
Method and system for wafer level singulation2013