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Home › Structure and method of fabricating three-dimensional (3D) metal-insulator-metal (MIM) capacitor and resistor in semi-additive plating metal wiring

Structure and method of fabricating three-dimensional (3D) metal-insulator-metal (MIM) capacitor and resistor in semi-additive plating metal wiring

US Patent 9954051 · Granted Apr 24, 2018

Estimated economic value: $74,029,000 ⓘ

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