Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269562 | In situ chamber clean with inert hydrogen helium mixture during wafer process | John C. Forster, Song-Moon Suh, Cheng-Hsiung Tsai, Glen T. Mori | 2016-02-23 |
| 9252002 | Two piece shutter disk assembly for a substrate process chamber | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Song-Moon Suh | 2016-02-02 |
| 9147558 | Finned shutter disk for a substrate process chamber | Bonnie T. Chia, Song-Moon Suh, Cheng-Hsiung Tsai, Glen T. Mori | 2015-09-29 |
| 5608320 | Mirror image differential induction amplitude magnetometer | Kelvin Shih | 1997-03-04 |
| 5432445 | Mirror image differential induction amplitude magnetometer | Kelvin Shih | 1995-07-11 |
| 5157841 | Portable electronic compass | — | 1992-10-27 |
| 4402142 | Electronic compass for automotive vehicles | — | 1983-09-06 |