Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014902 | System and method of cleaning process chamber components | Jong Yun Kim, Kim Seong SIM, Won Ho SUNG, Pei-Chia Chen | 2024-06-18 |
| 10695804 | Equipment cleaning apparatus and method | Suketu Arun Parikh, Todd Egan | 2020-06-30 |
| 6428663 | Preventing defect generation from targets through applying metal spray coatings on sidewalls | Glen T. Mori | 2002-08-06 |
| 6416634 | Method and apparatus for reducing target arcing during sputter deposition | Glen T. Mori | 2002-07-09 |
| 6379428 | Method for reducing particle concentration within a semiconductor device fabrication tool | Glen T. Mori | 2002-04-30 |