Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014902 | System and method of cleaning process chamber components | Jong Yun Kim, Roman Mostovoy, Won Ho SUNG, Pei-Chia Chen | 2024-06-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014902 | System and method of cleaning process chamber components | Jong Yun Kim, Roman Mostovoy, Won Ho SUNG, Pei-Chia Chen | 2024-06-18 |