Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472392 | Step coverage dielectric | Zongbin Wang, Loke Yuen Wong, Arvind Sundarrajan | 2016-10-18 |
| 9362111 | Hermetic CVD-cap with improved step coverage in high aspect ratio structures | Zongbin Wang, Arvind Sundarrajan, Bharat Bhushan | 2016-06-07 |
| 9177782 | Methods and apparatus for cleaning a substrate | James M. Holden, Song-Moon Suh, Glen T. Mori | 2015-11-03 |