Patents per Year
Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more | 2024-07-16 | $116,305,000 |
| 9472392 | Step coverage dielectric | Shalina Sudheeran, Loke Yuen Wong, Arvind Sundarrajan | 2016-10-18 | $11,711,000 |
| 9362111 | Hermetic CVD-cap with improved step coverage in high aspect ratio structures | Shalina Sudheeran, Arvind Sundarrajan, Bharat Bhushan | 2016-06-07 | $15,363,000 |
| 8445889 | Method of patterning of nanostructures | Kumar Bhupendra, Yuanyuan Zhang, Lain-Jong Li, Subodh Mhaisalkar | 2013-05-21 |