Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Compliant robot blade for substrate support and transfer

Compliant robot blade for substrate support and transfer

US Patent 11348823 · Granted May 31, 2022

Estimated economic value: $62,587,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Modular substrate support assembly2025
Side storage pods, equipment front end modules, and methods for processing subst2024
Organic contamination free surface machining2024
Detachable biasable electrostatic chuck for high temperature applications2024
Alignment module with a cleaning chamber2023
Multi-blade robot apparatus, electronic device manufacturing apparatus, and meth2023
Methods and apparatus for processing a substrate2023
Organic contamination free surface machining2023
System and method for aligning a mask with a substrate2022
Processing system for forming layers2022
Processing system for forming layers2022
Base plate for a processing chamber substrate support2022