Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications

Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications

US Patent 9548200 · Granted Jan 17, 2017

Estimated economic value: $72,770,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Modular substrate support assembly2025
On-board cleaning of tooling parts in hybrid bonding tool2025
Shutter disk2024
Shutter disk2024
High conductance inner shield for process chamber2024
High conductance inner shield for process chamber2024
Preclean chamber upper shield with showerhead2024
Preclean chamber upper shield with showerhead2024
Substrate dimension adapter2024
Methods for forming microwave tunable composited thin-film dielectric layer2024
Low warpage curing methodology by inducing curvature2024
Methods and apparatus for processing a substrate2024