Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368028 | Apparatus for improved high pressure plasma processing | William Johanson, Kirankumar Neelasandra SAVANDAIAH | 2025-07-22 |
| 12176191 | Magnetron design for improved bottom coverage and uniformity | Jie Zhang | 2024-12-24 |
| 11361950 | Multi-cathode processing chamber with dual rotatable shields | John Mazzocco | 2022-06-14 |