Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823933 | Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods | — | 2023-11-21 |
| 11749537 | Side storage pods, equipment front end modules, and methods for operating equipment front end modules | Murali Narasimhan, Paul B. Reuter, Nir Merry | 2023-09-05 |
| 11569102 | Oxidation inhibiting gas in a manufacturing system | Murali Narasimhan, Kunal Jain | 2023-01-31 |
| 11244844 | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods | Paul B. Reuter, Murali Narasimhan, Amulya L. Athayde, Dean C. Hruzek, Nir Merry | 2022-02-08 |
| 11171028 | Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods | — | 2021-11-09 |
| 10903102 | Methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter +2 more | 2021-01-26 |
| 10510570 | Systems, apparatus, and methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter +2 more | 2019-12-17 |
| 10444749 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2019-10-15 |
| 9884726 | Semiconductor wafer handling transport | Peter van der Meulen, Christopher C. Kiley, Raymond S. Ritter, Thomas A. Schaefer | 2018-02-06 |
| 8972029 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2015-03-03 |
| 8870514 | Semiconductor manufacturing process module | Peter van der Meulen, Christopher C. Kiley | 2014-10-28 |
| 8812150 | Semiconductor manufacturing process modules | Peter van der Meulen, Christopher C. Kiley | 2014-08-19 |
| 8775148 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2014-07-08 |
| 8696298 | Semiconductor manufacturing process modules | Peter van der Meulen, Christopher C. Kiley | 2014-04-15 |
| 8672605 | Semiconductor wafer handling and transport | Peter van der Meulen, Christopher C. Kiley, Raymond S. Ritter, Thomas A. Schaefer | 2014-03-18 |
| 8639365 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2014-01-28 |
| 8639489 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2014-01-28 |
| 8612198 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2013-12-17 |
| 8602716 | Semiconductor manufacturing process modules | Peter van der Meulen, Christopher C. Kiley | 2013-12-10 |
| 8500388 | Semiconductor wafer handling and transport | Peter van der Meulen, Christopher C. Kiley, Raymond S. Ritter, Thomas A. Schaefer | 2013-08-06 |
| 8473270 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2013-06-25 |
| 8442667 | Applications of neural networks | — | 2013-05-14 |
| 8313277 | Semiconductor manufacturing process modules | Peter van der Meulen, Christopher C. Kiley | 2012-11-20 |
| 8267632 | Semiconductor manufacturing process modules | Peter van der Meulen, Christopher C. Kiley | 2012-09-18 |
| 8197177 | Semiconductor wafer handling and transport | Peter van der Meulen, Christopher C. Kiley, Raymond S. Ritter, Thomas A. Schaefer | 2012-06-12 |