Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7945348 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2011-05-17 |
| 7899562 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2011-03-01 |
| 7890194 | Robotics programming interface | — | 2011-02-15 |
| 7769482 | Methods and systems for controlling a semiconductor fabrication process | Vinaya Kavathekar, Peter van der Meulen | 2010-08-03 |