Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Front-ducted equipment front end modules, side storage pods, and methods of operating the same

Front-ducted equipment front end modules, side storage pods, and methods of operating the same

US Patent 11373891 · Granted Jun 28, 2022

Estimated economic value: $26,475,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Equipment front end modules with induced gas mixing, and methods of use thereof2025
Seal mechanism for load port doors2025
Micro-electromechanical device for use in a flow control apparatus2025
Enclosure system having walls comprising sidewalls and radio-frequency identifie2024
Systems and methods for integrating load locks into a factory interface footprin2024
Shortened load port for factory interface2024
Filter isolation for equipment front end module2024
Factory interface robots usable with integrated load locks2024
Abatement and strip process chamber in a load lock configuration2024
Increased number of load ports on factory interface with robot that moves on tra2024
Prevention of contamination of substrates during gas purging2024
Enclosure system shelf including alignment features2024