Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130606 | Disturbance compensation for substrate processing recipes | Atilla Kilicarslan, Brooke Elise Montgomery, Paul Z. Wirth | 2024-10-29 |
| 11772958 | Mass flow control based on micro-electromechanical devices | Nir Merry, Paul Z. Wirth, Ming Xu, Sushant S. Koshti | 2023-10-03 |