Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130606 | Disturbance compensation for substrate processing recipes | Atilla Kilicarslan, Raechel Chu-Hui Tan, Paul Z. Wirth | 2024-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130606 | Disturbance compensation for substrate processing recipes | Atilla Kilicarslan, Raechel Chu-Hui Tan, Paul Z. Wirth | 2024-10-29 |