Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7577487 | Methods and apparatus for a band to band transfer module | Robert B. Lowrance, Eric A. Englhardt, Michael R. Rice, Sushant S. Koshti, Jeffrey C. Hudgens | 2009-08-18 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2008-05-20 |
| 7374393 | Method of retaining a substrate during a substrate transferring process | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2008-05-20 |
| 7221993 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2007-05-22 |
| 7107125 | Method and apparatus for monitoring the position of a semiconductor processing robot | Pyongwon Yim, Satish Sundar, Mario David Silvetti, Douglas Kitajima, Venkatesh Babu +3 more | 2006-09-12 |