Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6198976 | On the fly center-finding during substrate handling in a processing system | Peter Ebbing | 2001-03-06 |
| 6155773 | Substrate clamping apparatus | Peter Ebbing | 2000-12-05 |
| 6082950 | Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding | Allen Altwood, Kelly Colborne, Kevin Fairbairn, Christopher T. Lane, Hari Ponnekanti | 2000-07-04 |
| 5905302 | Loadlock cassette with wafer support rails | Christopher T. Lane | 1999-05-18 |
| 5838121 | Dual blade robot | Kevin Fairbairn, Christopher T. Lane, Kelly Colborne | 1998-11-17 |