Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486444 | Load-lock with external staging area | Kevin Fairbairn, Howard Grunes, Christopher T. Lane | 2002-11-26 |
| 6082950 | Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding | Allen Altwood, Kevin Fairbairn, Christopher T. Lane, Hari Ponnekanti, Satish Sundar | 2000-07-04 |
| 5902088 | Single loadlock chamber with wafer cooling function | Kevin Fairbairn, Christopher T. Lane | 1999-05-11 |
| 5855681 | Ultra high throughput wafer vacuum processing system | Dan Maydan, Sasson Somekh, Ashok Sinha, Kevin Fairbairn, Christopher T. Lane +2 more | 1999-01-05 |
| 5838121 | Dual blade robot | Kevin Fairbairn, Christopher T. Lane, Satish Sundar | 1998-11-17 |