Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653327 | Methods of removing a material layer from a substrate using water vapor treatment | Kwangduk Douglas Lee, Sudha Rathi, Chiu Chan, Martin Jay Seamons | 2017-05-16 |
| 6868856 | Enhanced remote plasma cleaning | Thomas Nowak, Ian Latchford, Tsutomu Tanaka, Ping Xu, Jason K. Foster +2 more | 2005-03-22 |
| 6436303 | Film removal employing a remote plasma source | Nam Le, Joseph D'Souza, Ashish Shrotriya | 2002-08-20 |