Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809026 | Selective deposition of a barrier layer on a metal film | Hyungsuk Alexander Yoon, Michael Yang, Hui Zhang, Ming Xi | 2004-10-26 |
| 6190233 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Choon Kun Ryu, Michael P. Nault, Kaushal K. Singh, Anthony Lam, Virendra V. Rana +1 more | 2001-02-20 |
| 6191026 | Method for submicron gap filling on a semiconductor substrate | Virendra V. Rana, Andrew Conners, Anand Gupta, Xin Sheng Guo | 2001-02-20 |
| 5990000 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Choon Kun Ryu, Michael P. Nault, Kaushal K. Singh, Anthony Lam, Virendra V. Rana +1 more | 1999-11-23 |