Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6190233 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Soonil Hong, Choon Kun Ryu, Michael P. Nault, Kaushal K. Singh, Anthony Lam +1 more | 2001-02-20 |
| 6191026 | Method for submicron gap filling on a semiconductor substrate | Virendra V. Rana, Anand Gupta, Xin Sheng Guo, Soonil Hong | 2001-02-20 |
| 5990000 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Soonil Hong, Choon Kun Ryu, Michael P. Nault, Kaushal K. Singh, Anthony Lam +1 more | 1999-11-23 |