Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576568 | Ionic additives for extreme low dielectric constant chemical formulations | Alexandros T. Demos, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2003-06-10 |
| 6562690 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-05-13 |
| 6559070 | Mesoporous silica films with mobile ion gettering and accelerated processing | — | 2003-05-06 |
| 6541367 | Very low dielectric constant plasma-enhanced CVD films | — | 2003-04-01 |
| 6541282 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-04-01 |
| 6448187 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Farhad Moghadam | 2002-09-10 |
| 6362115 | In-situ generation of p-xylyiene from liquid precursors | — | 2002-03-26 |
| 6348725 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2002-02-19 |
| 6303523 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2001-10-16 |
| 6245690 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Farhad Moghadam | 2001-06-12 |
| 6238735 | Method of uniformly coating a substrate | James C. Grambow, Ted Dettes, Donald R. Sauer, Emir Gurer, Edmond R. Ward | 2001-05-29 |
| 6171945 | CVD nanoporous silica low dielectric constant films | David Cheung, Wai-Fan Yau | 2001-01-09 |
| 6107184 | Nano-porous copolymer films having low dielectric constants | David Cheung, Peter Wai-Man Lee, Chi-I Lang | 2000-08-22 |
| 6013315 | Dispense nozzle design and dispense method | — | 2000-01-11 |
| 5954878 | Apparatus for uniformly coating a substrate | James C. Grambow, Ted C. Bettes, Donald R. Sauer, Emir Guegrer, Edmond R. Ward | 1999-09-21 |
| 5670210 | Method of uniformly coating a substrate | James C. Grambow, Ted C. Bettes, Donald R. Sauer, Emir Gurer, Edmond R. Ward | 1997-09-23 |