Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mesoporous films having reduced dielectric constants

Mesoporous films having reduced dielectric constants

US Patent 6592980 · Granted Jul 15, 2003

Estimated economic value: $26,668,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Photoresist development with halide chemistries2025
Photoresist development with halide chemistries2025
Reduced H2 consumption during deoxygenation2025
Isomerization of biofeeds over base metal catalysts2025
Cyclic development of metal oxide based photoresist for etch stop deterrence2025
Pre-exposure photoresist curing to enhance EUV lithographic performance2025
Methods, systems, and devices for sensor fusion2025
Gas injection system and reactor system including same2025
Susceptors with film deposition control features2025
High temperature coatings for a preclean and etch apparatus and related methods2025
Fixture and method for determining position of a target in a reaction chamber2025
Process tool for dry removal of photoresist2025