Susceptors with film deposition control features

Assignee

• Asm Ip Holding B.V.

Inventors

• Shujin Huang (4 patents)
• Junwei Su (13 patents)
• Xing Lin (30 patents)
• Alexandros T. Demos (75 patents)
• Rutvij Naik (6 patents)
• Wentao Wang (94 patents)
• Matthew G. Goodman (26 patents)
• Robin Scott (11 patents)
• Amir Kajbafvala (7 patents)
• Robinson James (2 patents)
• Youness Alvandi-Tabrizi (2 patents)
• Caleb Miskin (9 patents)

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