Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process tool for dry removal of photoresist

Process tool for dry removal of photoresist

US Patent 12346035 · Granted Jul 1, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Photoresist development with halide chemistries2025
Photoresist development with halide chemistries2025
Cyclic development of metal oxide based photoresist for etch stop deterrence2025
Pre-exposure photoresist curing to enhance EUV lithographic performance2025
Integrated dry processes for patterning radiation photoresist patterning2025
Dry development of resists2025
Integrated dry processes for patterning radiation photoresist patterning2024
Photoresist development with halide chemistries2024
Zincating and doping of metal liner for liner passivation and adhesion improveme2024
Solar cell emitter region fabrication using substrate-level ion implantation2024
Methods for making hard masks useful in next-generation lithography2024
Systems and methods for preventing stiction of high aspect ratio structures and/2023