Integrated dry processes for patterning radiation photoresist patterning

Assignee

• Lam Research

Inventors

• Jengyi Yu (36 patents)
• Unknown
• Mohammed Haroon Alvi (2 patents)
• Richard Wise (36 patents)
• Yang Pan (161 patents)
• Richard A. Gottscho (56 patents)
• Adrien LaVoie (177 patents)
• Sivananda K. Kanakasabapathy (204 patents)
• Timothy Weidman (80 patents)
• Qinghuang Lin (135 patents)
• Jerome S. Hubacek (13 patents)

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