Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Richard Wise, Yang Pan, Richard A. Gottscho +5 more | 2025-04-15 |
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Richard Wise, Yang Pan, Richard A. Gottscho +5 more | 2024-12-31 |