Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464782 | Apparatus for vaporization sequence for multiple liquid precursors used in semiconductor thin film applications | Hiroshi Nishizato, Jun Zhao, Ichiro Yokoyama | 2002-10-15 |
| 5958510 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Bang Nguyen, Gayathri Rao, Stuardo Robles, Gary Fong, Vicente Lim +1 more | 1999-09-28 |
| 5531183 | Vaporization sequence for multiple liquid precursors used in semiconductor thin film applications | Hiroshi Nishizato, Jun Zhao, Ichiro Yokoyama | 1996-07-02 |