Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180849 | Direct liquid injection system for thin film deposition | Subramanya P. HERLE, Basavaraj Pattanshetty, Ajay Balaram MORE, Marco Mohr, Bjoern Sticksel-Weis +2 more | 2021-11-23 |
| 5958510 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Visweswaren Sivaramakrishnam, Bang Nguyen, Gayathri Rao, Stuardo Robles, Gary Fong +1 more | 1999-09-28 |