Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5792269 | Gas distribution for CVD systems | Thomas E. Deacon, David Cheung, Judy H. Huang | 1998-08-11 |
| 5354387 | Boron phosphorus silicate glass composite layer on semiconductor wafer | David N. Wang, Makoto Nagashima, Kazuto Fukuma, Tetsuya Sato | 1994-10-11 |
| 5314845 | Two step process for forming void-free oxide layer over stepped surface of semiconductor wafer | David N. Wang, Makoto Nagashima, Kazuto Fukuma, Tatsuya Sato | 1994-05-24 |
| 5166101 | Method for forming a boron phosphorus silicate glass composite layer on a semiconductor wafer | David N. Wang, Makoto Nagashima, Kazuto Fukuma, Tetsuya Sato | 1992-11-24 |