Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6319324 | Method and apparatus for elimination of TEOS/ozone silicon oxide surface sensitivity | Bang Nguyen, Shankar Vankataranan, Peter Wai-Man Lee | 2001-11-20 | $71,675,000 |
| 6149974 | Method for elimination of TEOS/ozone silicon oxide surface sensitivity | Bang Nguyen, Shankar Vankataranan, Peter Wai-Man Lee | 2000-11-21 | $50,110,000 |