Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319324 | Method and apparatus for elimination of TEOS/ozone silicon oxide surface sensitivity | Bang Nguyen, Ruby Liao, Peter Wai-Man Lee | 2001-11-20 |
| 6149974 | Method for elimination of TEOS/ozone silicon oxide surface sensitivity | Bang Nguyen, Ruby Liao, Peter Wai-Man Lee | 2000-11-21 |