Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164221 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Keith Kuang-Kuo Koai, Wen-Hao Cheng | 2024-12-10 |
| 11762280 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Keith Kuang-Kuo Koai, Wen-Hao Cheng | 2023-09-19 |
| 11454877 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Keith Kuang-Kuo Koai, Wen-Hao Cheng | 2022-09-27 |