Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215422 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, TAI-PIN LIU, Keith Kuang-Kuo Koai | 2025-02-04 |
| 11859284 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, TAI-PIN LIU, Keith Kuang-Kuo Koai | 2024-01-02 |
| 9970105 | Method for sealing processing module | Chun-Ta Chen, Cheng-Chieh Chen, Hong-Hsing Chou, Yeh-Chieh Wang, Jeng-Yann Tsay +1 more | 2018-05-15 |