Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215422 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, Shyue-Shin Tsai, Keith Kuang-Kuo Koai | 2025-02-04 |
| 11859284 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, Shyue-Shin Tsai, Keith Kuang-Kuo Koai | 2024-01-02 |