Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370648 | Surface clean system and method | Pei-Yi Su | 2025-07-29 |
| 12360464 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2025-07-15 |
| 12362160 | Method for forming layer | Hsin-Liang Chen, Wen-Chih Wang, Chia-Hung Liao, Yi-Ming Yeh, Hung-Ting Lin +1 more | 2025-07-15 |
| 12191127 | Apparatus for physical vapor deposition and method for forming a layer | Hsin-Liang Chen, Wen-Chih Wang, Chia-Hung Liao, Yi-Ming Yeh, Hung-Ting Lin +1 more | 2025-01-07 |
| 12070779 | Method of manufacturing semiconductor wafer and cleaning scrubber | Pei-Yi Su | 2024-08-27 |
| 11782350 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2023-10-10 |
| 11520243 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2022-12-06 |
| 11226564 | EUV light source and apparatus for lithography | Jhan-Hong YEH, Jeng-Yann Tsay, Li-Jui Chen, Henry Yee Shian Tong, Wen-Chih Wang +1 more | 2022-01-18 |
| 11176306 | Methods and systems to perform automated Integrated Fan-Out wafer level package routing | About Liao, Bing-Siang Chen, Happy Wang, Pagan Chou, Philippe Aubert McComber +1 more | 2021-11-16 |
| 11158989 | Laser source device, extreme ultraviolet lithography device and method | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Li-Jui Chen +2 more | 2021-10-26 |
| 10624196 | Laser source device and extreme ultraviolet lithography device | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Li-Jui Chen +2 more | 2020-04-14 |
| 9970105 | Method for sealing processing module | Chun-Ta Chen, Hong-Hsing Chou, Yeh-Chieh Wang, Jeng-Yann Tsay, Shyue-Shin Tsai +1 more | 2018-05-15 |
| 9791415 | Method for monitoring usage of a physical vapor deposition (PVD) target with an ultrasonic transducer | Tsung-Jen Yang, Hong-Hsing Chou | 2017-10-17 |
| 8375804 | Apparatus for testing bonding strength of electrical connections and frictionless calibration device for the same | Chia-Ho Su, Wen-Sheng Lin | 2013-02-19 |
| 7585331 | Long-term antibiotic and deodorant textile with mesoporous structure and processing method thereof | Pui-Leng Lai, Chun-Hung Lin, Jia-Peng Lin, Nai-Yun Liang | 2009-09-08 |