Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189311 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Han-Lung Chang, Tzung-Chi Fu, Li-Jui Chen | 2025-01-07 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2024-10-08 |
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2023-10-24 |
| 11698591 | System and method of discharging an EUV mask | Yi-Zhen Chen, Yen-Hsun Chen, Tzung-Chi Fu, Han-Lung Chang, Li-Jui Chen | 2023-07-11 |
| 11687011 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Han-Lung Chang, Tzung-Chi Fu, Li-Jui Chen | 2023-06-27 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Ting-Ya CHENG, Yee-Shian Henry TONG, Chun-Lin Chang +3 more | 2022-09-20 |
| 11226564 | EUV light source and apparatus for lithography | Cheng-Chieh Chen, Jeng-Yann Tsay, Li-Jui Chen, Henry Yee Shian Tong, Wen-Chih Wang +1 more | 2022-01-18 |