Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332571 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2025-06-17 |
| 12133319 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Lin Chang, Li-Jui Chen, Han-Lung Chang | 2024-10-29 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2024-10-08 |
| 11860544 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2024-01-02 |
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2023-10-24 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Yee-Shian Henry TONG, Chun-Lin Chang +3 more | 2022-09-20 |
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2022-05-24 |
| 11212903 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Lin Chang, Li-Jui Chen, Han-Lung Chang | 2021-12-28 |